Display panel and touch display device

ABSTRACT

A display panel and a touch display device are disclosed herein. In one embodiment, the display panel includes data lines, gate lines, subpixels defined by the data lines and the gate lines, and touch sensors, and a touch sensing circuit sensing a touch or a touched position using the touch sensors. Each of the touch sensors is located on an encapsulation layer and comprises two or more sub-electrodes located on different layers, where the two or more sub-electrodes are electrically connected to each other.

CROSS REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.15/665,255 filed Jul. 31, 2017, which claims priority from Korean PatentApplication No. 10-2016-0156885 filed on Nov. 23, 2016, which is herebyincorporated by reference for all purposes as if fully set forth herein.

BACKGROUND Field

The present disclosure relates to a display panel and a touch displaydevice having a built-in touch panel.

Description of Related Art

In response to the development of the information society, demand for avariety of display devices for displaying images is increasing. Forexample, a range of display devices, such as liquid crystal display(LCD) devices, plasma display panels (PDPs), and organic light-emittingdiode (OLED) display devices, have been developed.

Many display devices provide touch-based user interfaces enabling usersto intuitively and conveniently input data or instructions directly todevices, rather than using conventional data input systems, such asbuttons, a keyboard, or a mouse.

To provide such touch-based user interfaces, the ability to sense atouch by a user and to accurately detect coordinates of the touch isrequired.

To detect touches made to touch panels (also referred to as touchscreenpanels) by users, a touch sensing method such as a resistive touchsensing using a resistive film, capacitive touch sensing,electromagnetic induction touch sensing, infrared (IR) touch sensing, orultrasonic touch sensing, may be used.

Among various touch sensing methods, capacitance touch sensing iscommonly used to sense a touch and determine touch coordinates, using aplurality of touch electrodes disposed on a touch panel as touchsensors, based on a change in capacitance between touch electrodes orbetween a touch electrode and a pointer, such as a finger.

Various methods of disposing a touch panel including electrodes in adisplay panel have been used in order to facilitate the fabrication ofdisplay devices and reduce the sizes of display devices.

Among a variety of display devices, OLED display devices can befabricated to be relatively light compared to the other display devices,since OLEDs or organic electroluminescent (EL) devices able to emitlight themselves are used therein and a separate light source is notrequired.

In addition, OLED display devices are not only advantageous in terms ofpower consumption, since they are driven at low voltages, but also havedesirable qualities, such as the ability to implement a range of colorsof light, rapid response rates, wide viewing angles, and high contrastratios. Thus, OLED display devices for next-generation displays havebeen actively researched.

Although OLED display devices are significantly advantageous in terms ofdisplay, there are significant difficulties and a range of limitationsregarding touch panels to be disposed within OLED display devices.

For example, an encapsulation layer or the like for protecting the OLEDdisplay panel from moisture, air, physical impacts, or impurities thatwould be created during fabrication processing may be provided on thefront surface of the OLED display panel to make the OLED display panelreliable. However, this consequently causes processing to be relativelycomplicated and difficult. In addition, the encapsulation layer makes itdifficult to determine the positions of touch sensors without loweringdisplay performance.

In addition, high temperature processing for implementing touch sensorsincluding a metal material may damage organic materials in the OLEDdisplay panel.

As a result, it is difficult to dispose touch electrodes acting as touchsensors within OLED display panels. That is, it is significantlydifficult to realize OLED display panels having a built-in touch panel.

Thus, in OLED display devices of the related art, a touch structure hasbeen realized by attaching a touch panel to an OLED display panel ratherthan disposing the touch panel within the OLED display panel.

In such a case, the touch panel is fabricated separately from the OLEDdisplay panel before being attached to the OLED display panel, therebycomplex fabrication processing and increased thickness of a resultantOLED display device.

BRIEF SUMMARY

Various aspects of the present disclosure provide a display panel and atouch display device including a built-in touch panel. The touch panelincludes touch sensors disposed on an encapsulation layer in atouch-on-encapsulation (TOE) structure.

Also provided are a display panel and a touch display device, each ofwhich has a touch structure able to reduce RC delay and improve touchsensitivity.

Also provided are a display panel and a touch display device, each ofwhich has a touch structure allowing a large panel to be realized.

Also provided are a display panel and a touch display device, each ofwhich allows mobile devices and wearable devices requiring a thinnerencapsulation layer and higher touch sensitivity to be realized.

According to an aspect of the present disclosure, a touch display devicecomprises a display panel comprising data lines, gate lines, subpixelsdefined by the data lines and the gate lines, and touch sensors, and atouch sensing circuit sensing a touch or a touched position using thetouch sensors. Each of the touch sensors is located on an encapsulationlayer and comprises two or more sub-electrodes located on differentlayers, the two or more sub-electrodes electrically connected to eachother.

In one or more embodiments, one of the two or more sub-electrodes isdisposed directly on the encapsulation layer.

In one or more embodiments, the encapsulation layer is disposed betweenone of the two or more sub-electrodes and an organic light emittingdiode.

In one or more embodiments, the touch sensors include amorphoustransparent conductive materials formed by a low temperature depositionprocess at a process temperature of 100° C. or less.

In one or more embodiments, the display panel further comprises signallines electrically connected to at least a subset of the touch sensors.The signal lines may be located on the encapsulation layer. Each of thesignal lines may comprise two or more sub-lines.

In one or more embodiments, the touch sensors comprise drivingelectrodes and sensing electrodes. Two or more of the driving electrodesdisposed in a first direction may be electrically connected to eachother via one or more driving bridges, and the two or more of thedriving electrodes may be electrically connected to a correspondingdriving signal line. Two or more of the sensing electrodes disposed in asecond direction may be electrically connected to each other via one ormore sensing bridges, and the two or more of the sensing electrodes maybe electrically connected to a corresponding sensing signal line. Theone or more driving bridges and the one or more sensing bridges may belocated on different layers of the two or more sub-electrodes. The touchsensing circuit may supply touch driving signals to driving signal linesand sense the touch or the touched position based on touch sensingsignals received through sensing signal lines in response to the touchdriving signals.

In one or more embodiments, the touch sensors are electrically isolatedfrom each other, where each of the touch sensors may be electricallyconnected to a corresponding signal line. The touch sensing circuit maysupply touch driving signals to signal lines and may sense the touch orthe touched position based on touch sensing signals received through thesignal lines in response to the touch driving signals.

In one or more embodiments, each of the touch sensors comprises atransparent electrode without any open area within the transparentelectrode.

In one or more embodiments, each of the touch sensors comprises a meshtype electrode having one or more open areas, each of the one or moreopen areas corresponding to a corresponding light-emitting area of thesubpixels.

In one or more embodiments, a transparent electrode is disposed on orbelow a corresponding one of the touch sensors or is disposed betweentwo sub-electrodes from the two or more sub-electrodes of thecorresponding one of the touch sensors. The transparent electrode mayhave a greater area than the two or more sub-electrodes.

In one or more embodiments, a passivation layer is located on the touchsensors.

In one or more embodiments, a buffer layer is disposed between (i) theencapsulation layer and (ii) the touch sensors.

According to an aspect of the present disclosure, a touch display panelincludes subpixels defined by data lines and gate lines, where eachsubpixel includes an organic light-emitting diode comprising a firstelectrode, an organic light-emitting layer, and a second electrode, anda driving transistor for driving the organic light-emitting diode. Thetouch display panel further includes an encapsulation layer located onthe second electrode of the organic light-emitting diode and touchsensors for touch sensing disposed on the encapsulation layer. Each ofthe touch sensors comprises two or more sub-electrodes located ondifferent layers, the two or more sub-electrodes electrically connectedto each other

In one or more embodiments, one of the two or more sub-electrodes isdisposed directly on the encapsulation layer.

In one or more embodiments, the encapsulation layer is disposed betweenone of the two or more sub-electrodes and the organic light emittingdiode.

In one or more embodiments, the touch sensors include amorphoustransparent conductive materials formed by a low temperature depositionprocess at a process temperature of 100° C. or less.

In one or more embodiments, a transparent electrode is disposed on orbelow a corresponding one of the touch sensors or is disposed betweentwo sub-electrodes from the two or more sub-electrodes of thecorresponding one of the touch sensors. The transparent electrode mayhave a greater area than the two or more sub-electrodes.

In one or more embodiments, a passivation layer is located on the touchsensors.

In one or more embodiments, a buffer layer is disposed between (i) theencapsulation layer and (ii) the touch sensors.

In one or more embodiments, a thickness of the encapsulation layer is 5μm or greater.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features and advantages of the presentdisclosure will be more clearly understood from the following detaileddescription when taken in conjunction with the accompanying drawings, inwhich:

FIG. 1 is a schematic view illustrating the configuration of a touchdisplay device according to exemplary embodiments;

FIG. 2A illustrates a display panel according to exemplary embodiments;

FIG. 2B illustrates a built-in touch panel provided in the display panelaccording to exemplary embodiments;

FIG. 3A and FIG. 3B are schematic circuit diagrams illustrating asubpixel circuit in the display panel according to exemplaryembodiments;

FIG. 4 illustrates the position of a touch sensor in the display panelaccording to exemplary embodiments;

FIG. 5 illustrates parasitic capacitance formed between the touch sensorand the second electrode, as well as an influence of the parasiticcapacitance on touch sensitivity, in the touch display device accordingto exemplary embodiments;

FIG. 6 illustrates an electrode type touch sensor without an open areain the touch display device according to exemplary embodiments;

FIG. 7 illustrates an electrode type touch sensor having open areas inthe touch display device according to exemplary embodiments;

FIG. 8 illustrates an exemplary mutual capacitance-based touch panelaccording to exemplary embodiments;

FIG. 9 illustrates another exemplary mutual capacitance-based touchpanel according to exemplary embodiments;

FIG. 10 illustrates further another exemplary mutual capacitance-basedtouch panel including touch sensors with open areas, according toexemplary embodiments;

FIG. 11 is a cross-sectional view taken along line A-A′ in the touchpanel illustrated in FIG. 10;

FIG. 12 is a cross-sectional view taken along line B-B′ in the touchpanel illustrated in FIG. 10;

FIG. 13 and FIG. 14 illustrate open areas of a touch sensor andlight-emitting areas in the touch display device according to exemplaryembodiments;

FIG. 15 illustrates a multi-electrode structure of touch sensors and asingle line structure of signal lines in the touch display deviceaccording to exemplary embodiments;

FIG. 16 illustrates a multi-electrode structure of touch sensors and amulti-line structure of signal lines in the touch display deviceaccording to exemplary embodiments;

FIG. 17 and FIG. 18 illustrate an exemplary structure for improving thesensitivity of touch sensors in the touch display device according toexemplary embodiments;

FIG. 19 illustrates an exemplary structure for protecting touch sensorsin the touch display device according to exemplary embodiments;

FIG. 20 illustrates an exemplary interlayer protection structure in thetouch display device according to exemplary embodiments;

FIG. 21 illustrates an example of modified bridges in the touch displaydevice according to exemplary embodiments;

FIG. 22 illustrates another exemplary mutual capacitance-based touchpanel including touch sensors without an open area, according toexemplary embodiments;

FIG. 23 is a cross-sectional view taken along line A-A′ in the touchpanel illustrated in FIG. 22;

FIG. 24 is a cross-sectional view taken along line B-B′ in the touchpanel illustrated in FIG. 22;

FIG. 25 illustrates an exemplary self-capacitance-based touch panelincluding touch sensors with open areas, according to exemplaryembodiments;

FIG. 26 is a cross-sectional view taken along line C-C′ in the touchpanel illustrated in FIG. 25;

FIG. 27 illustrates an exemplary self-capacitance-based touch panel inwhich electrode type touch sensors without an open area are disposed,according to exemplary embodiments; and

FIG. 28 is a cross-sectional view taken along line C-C′ in the touchpanel illustrated in FIG. 27.

DETAILED DESCRIPTION

Hereinafter, reference will be made to exemplary embodiments of thepresent disclosure in detail, examples of which are illustrated in theaccompanying drawings. Throughout this document, reference should bemade to the drawings, in which the same reference numerals and symbolswill be used to designate the same or like components. In the followingdescription of the present disclosure, detailed descriptions of knownfunctions and components incorporated herein will be omitted in the casethat the subject matter of the present disclosure may be renderedunclear thereby.

It will also be understood that, while terms such as “first,” “second,”“A,” “B,” “(a),” and “(b)” may be used herein to describe variouselements, such terms are only used to distinguish one element fromanother element. The substance, sequence, order, or number of theseelements is not limited by these terms. It will be understood that whenan element is referred to as being “connected to” or “coupled to”another element, not only can it be “directly connected or coupled to”the other element, but it can also be “indirectly connected or coupledto” the other element via an “intervening” element. In the same context,it will be understood that when an element is referred to as beingformed “on” or “under” another element, not only can it be directlyformed on or under another element, but it can also be indirectly formedon or under another element via an intervening element.

FIG. 1 is a schematic view illustrating the configuration of a touchdisplay device 100 according to exemplary embodiments, FIG. 2Aillustrates a display panel 110 according to exemplary embodiments, andFIG. 2B illustrates a built-in touch panel (or a built-in touchscreenpanel) TP provided in the display panel 110 according to exemplaryembodiments.

The touch display device 100 according to exemplary embodiments furtherincludes, in addition to the display panel 110, a data driving circuit120, a gate driving circuit 130, and a touch sensing circuit 140.

The display panel 110 has data lines DL and gate lines GL, as well assubpixels SP defined by the data lines DL and the gate lines GL, todisplay images.

The data driving circuit 120 drives the data lines DL of the displaypanel 110.

For example, the data driving circuit 120 can supply data voltages tothe data lines during a display section.

The gate driving circuit 130 drives the gate lines GL of the displaypanel 110.

For example, the gate driving circuit 130 can sequentially supplyscanning signals to the gate lines during the display section.

The display panel 110 can also act as the touch panel TP within whichtouch sensors are disposed to perform touch sensing.

In this regard, the display panel 110 may have built-in touch sensors(i.e., touch electrodes) disposed therein.

Thus, the touch panel TP may be provided as a built-in component of thedisplay panel 110.

Here, the touch panel TP is a part of the display panel 110 that isrequired for touch sensing, and may refer to an assembly of touchsensors provided in the display panel 110.

The touch sensing circuit 140 senses a touch by a user and/or a touchedposition using the touch sensors provided in the display panel 110.

The touch panel TP according to exemplary embodiments may have a mutualcapacitance-based touch structure or a self-capacitance-based touchstructure.

When the touch panel TP according to exemplary embodiments has a mutualcapacitance-based touch structure, the touch sensors of the touch panelTP are categorized as driving electrodes (also referred to astransmitting electrodes) and sensing electrodes (also referred to asreceiving electrodes), depending on the role and function thereof.

In this case, the touch sensing circuit 140 supplies touch drivingsignals to the touch sensors corresponding to the driving electrodes andsenses a touch and/or touch coordinates, based on touch sensing signalsreceived from the touch sensors corresponding to the sensing electrodes.

When the touch panel TP according to exemplary embodiments has aself-capacitance-based touch structure, each of the touch sensors of thetouch panel TP functions as both a driving electrode (or a transmittingelectrode) and a sensing electrode (or a receiving electrode).

Thus, the touch sensing circuit 140 supplies touch driving signals tothe touch sensors, receives (or detects) touch sensing signals from thetouch sensors to which the touch driving signals have been supplied, andsenses a touch and/or touch coordinates, based on the received (ordetected) touch sensing signals.

The touch display device 100 according to exemplary embodiments displaysimages using organic light-emitting diodes (OLEDs) or organicelectroluminescent (EL) devices.

Hereinafter, a subpixel structure (or a subpixel circuit) in the displaypanel 110 for displaying images using OLEDs will be described.

FIG. 3A and FIG. 3B are schematic circuit diagrams illustrating asubpixel circuit in the display panel 110 according to exemplaryembodiments.

Referring to FIG. 3A and FIG. 3B, each of the subpixels SP includes,basically, an OLED and a driving transistor DRT driving the OLED.

Referring to FIG. 3A, each of the subpixels SP further includes a firsttransistor T1 delivering a data voltage VDATA to a first node N1 of thedriving transistor DRT corresponding to a gate node and a storagecapacitor C1 maintaining the data voltage VDATA corresponding to animage signal voltage or a voltage corresponding to the data voltageVDATA for the period of a single frame.

The OLED includes a first electrode (e.g., an anode or a cathode) E1, anorganic light-emitting layer EL, and a second electrode (e.g., a cathodeor an anode) E2.

For example, a base voltage EVSS is applied to the second electrode E2of the OLED.

The driving transistor DRT can drive the OLED by supplying drivingcurrent to the OLED.

The driving transistor DRT further has a second node N2 and a third nodeN3, in addition to the first node N1.

The first node N1 of the driving transistor DRT is a node correspondingto the gate node and is electrically connected to a source node or adrain node of the first transistor T1.

The second node N2 of the driving transistor DRT is electricallyconnected to the first electrode E1 of the OLED. The second node N2 ofthe driving transistor DRT may be a source node or a drain node.

The third node N3 of the driving transistor DRT is a node to which adriving voltage EVDD is applied, and is electrically connected to adriving voltage line DVL through which the driving voltage EVDD issupplied. The third node N3 of the driving transistor DRT may be a drainnode or a source node.

The driving transistor DRT and the first transistor T1 may be embodiedas n-type transistors or p-type transistors.

The first transistor T1 is electrically connected between a data line DLand the first node N1 of the driving transistor DRT. The firsttransistor T1 can be controlled by a scanning signal SCAN applied to thegate node of the first transistor T1 through a gate line.

The first transistor T1 can be turned on by the scanning signal SCAN todeliver the data voltage VDATA, supplied through the data line DL, tothe first node of the driving transistor DRT.

The storage capacitor C1 is electrically connected between the firstnode N1 and the second node N2 of the driving transistor DRT.

The storage capacitor C1 is not a parasitic capacitor Cgs or Cgd, i.e.,an internal capacitor present between the first node N1 and the secondnode N2 of the driving transistor DRT, but is an external capacitorintentionally designed to be disposed outside of the driving transistorDRT.

Referring to FIG. 3B, each of the subpixels SP on the display panel 110according to exemplary embodiments further includes a second transistorT2, in addition to the OLED, the driving transistor DRT, the firsttransistor T1, and the storage capacitor C1.

Referring to FIG. 3B, the second transistor T2 is electrically connectedbetween the second node N2 of the driving transistor DRT and a referencevoltage line RVL through which a reference voltage VREF is supplied. Thesecond transistor T2 can be controlled by a sensing signal SENSE, i.e.,a scanning signal, supplied to the gate node of the second transistorT2.

Since the second transistor T2 is further provided, it is possible toeffectively control the voltage status of the second node N2 of thedriving transistor DRT in the subpixel SP.

The second transistor T2 can be turned on by the sensing signal SENSE toapply the reference voltage VREF, supplied through the reference voltageline RVL, to the second node N2 of the driving transistor DRT.

The subpixel structure illustrated in FIG. 3B is advantageous foraccurately initializing the voltage of the second node N2 of the drivingtransistor DRT and sensing the unique characteristics (e.g., thethreshold voltage or the degree of mobility) of the driving transistorDRT and the unique characteristics (e.g., the threshold voltage) of theOLED.

The scanning signal SCAN and the sensing signal SENSE may be separategate signals. In this case, the scanning signal SCAN and the sensingsignal SENSE may be applied to the gate node of the first transistor T1and the gate node of the second transistor T2, respectively, throughdifferent gate lines.

Alternatively, the scanning signal SCAN and the sensing signal SENSE maybe identical gate signals. In this case, the scanning signal SCAN andthe sensing signal SENSE may be commonly applied to the gate node of thefirst transistor T1 and the gate node of the second transistor T2.

FIG. 4 illustrates the position of a touch sensor TS in the displaypanel 110 according to exemplary embodiments.

Referring to FIG. 4, in the display panel 110 according to exemplaryembodiments, the touch sensor TS may be directly disposed on anencapsulation layer 400 located on an OLED.

The encapsulation layer 400 is a layer protecting organic mattercontained in an organic light-emitting layer EL from moisture, air, andthe like. The encapsulation layer 400 is located on the second electrodeE2 of the OLED that may act as the cathode.

The encapsulation layer 400 may be formed of a metal or an inorganicmaterial or may have a multilayer structure in which one or more organiclayers and one or more inorganic layers are stacked on each other.

The touch structure having the touch sensor TS disposed on theencapsulation layer 400 as described above is referred to as atouch-on-encapsulation (TOE) structure.

A color filter layer may be additionally disposed between theencapsulation layer 400 and the touch sensor TS or may be additionallydisposed on the touch sensor TS.

FIG. 5 illustrates parasitic capacitance Cp formed between the touchsensor TS and the second electrode E2, as well as an influence of theparasitic capacitance Cp on touch sensitivity, in the touch displaydevice according to exemplary embodiments.

Referring to FIG. 5, a touch driving signal having a predeterminedvoltage level may be applied to the touch sensor TS during a touchsensing section.

This consequently causes a potential difference between the secondelectrode E2 and the touch sensor TS, thereby forming capacitance.

Capacitance for touch sensing is capacitance between touch sensors TS orcapacitance between a touch sensor TS and a touch object (e.g., a fingeror a stylus).

Thus, the capacitance formed between the second electrode E2 and thetouch sensor TS is the parasitic capacitance Cp.

To embody the display panel 110 having the built-in touch panel TP, thetouch panel TP may be provided as a built-in component in the displaypanel 110 by directly forming the touch sensor TS on the encapsulationlayer 400, thereby significantly reducing the distance D between thesecond electrode E2 and the touch sensor TS.

However, this may consequently increase the parasitic capacitance Cpbetween the second electrode E2 and the touch sensor TS, therebyincreasing resistive-capacitive (RC) delay.

In the display panel 110 according to exemplary embodiments, thedistance D between the second electrode E2 and the touch sensor TS maybe 5 μm or greater.

In this regard, the encapsulation layer 400 may be formed to have athickness of 5 μm or greater.

As described above, the parasitic capacitance Cp between the secondelectrode E2 and the touch sensor TS can be reduced. This canconsequently reduce RC delay, thereby improving touch sensitivity.

In one example, the thickness of the encapsulation layer 400 may be 5 μmor greater but to not exceed a maximum thickness (e.g., 10 μm˜20 μm).

FIG. 6 illustrates an electrode type touch sensor TS without an openarea in the touch display device 100 according to exemplary embodiments.

In the touch display device 100, each touch sensor TS may be atransparent electrode without an open area. For example, the touchsensor TS includes amorphous transparent conductive materials formed bya low temperature deposition process at a process temperature of 100° C.or less.

In one embodiment, the touch sensor TS is designed to have a bulkstructure (e.g., a bulk electrode type) without an open area OA asdescribed above, such that the touch sensor TS can be easily patterned.In addition, when the touch sensor TS is implemented as a transparentelectrode, the touch sensor TS without an influence on light-emittingperformance in a subpixel area can be provided as a built-in componentwithin the display panel 110.

FIG. 7 illustrates an electrode type touch sensor TS having open areasin the touch display device 100 according to exemplary embodiments.

In the touch display device 100, each touch sensor TS may be a mesh typeelectrode with one or more open areas OA.

The area of a single touch sensor TS, i.e., a single driving electrodeTx or a single sensing electrode Rx, may be greater than the area of asingle subpixel.

For example, several or tens of subpixels may be present in the area ofa single touch sensor TS.

In this case, each touch sensor TS may be an opaque electrode or atransparent electrode. For example, the touch sensor TS includesamorphous transparent conductive materials formed by a low temperaturedeposition process at a process temperature of 100° C. or less.

The open areas OA correspond to the light-emitting areas of thesubpixels SP.

As described above, the touch sensor TS can be provided as a built-incomponent in the display panel 110 without lowering the light-emittingefficiency of each subpixel.

Hereinafter, a TOE structure capable of improving touch sensitivity byreducing RC delay will be described.

First, a TEO structure for mutual capacitance-based touch sensing willbe described with reference to FIG. 8 to FIG. 24. Then, a TOE structurefor self-capacitance-based touch sensing will be described withreference to FIG. 25 to FIG. 28.

FIG. 8 illustrates an exemplary mutual capacitance-based touch panel TPaccording to exemplary embodiments.

Referring to FIG. 8, when the touch display device 100 according toexemplary embodiments performs mutual capacitance-based touch sensing,touch sensors TS provided in the mutual capacitance-based touch panel TPinclude driving lines Tx line and receiving lines Rx line.

Referring to FIG. 8, each of the driving lines Tx line and the receivinglines Rx line has a line shape.

Referring to FIG. 8, signal lines TL are provided in the display panel110. The signal lines TL are electrically connected to correspondingtouch sensors TS.

The signal lines TL allow the touch sensors TS to be electricallyconnected to the touch sensing circuit 140.

Driving signal lines Lt are connected to the driving lines Tx line,respectively, while sensing signal lines Lr are connected to thereceiving lines Rx line, respectively.

Referring to FIG. 8, in crossing areas CA, the driving lines Tx linemust not be electrically connected to the receiving lines Rx line.

The driving lines Tx line and the receiving lines Rx line may be presenton the same layer or different layers.

FIG. 9 illustrates another exemplary mutual capacitance-based touchpanel TP according to exemplary embodiments.

FIG. 9 illustrates an example of the structure in which drivingelectrodes Tx and sensing electrodes Rx are disposed on the same layer.

Referring to FIG. 9, touch sensors TX include driving electrodes Tx andsensing electrodes Tx.

Referring to FIG. 9, the driving electrodes Tx located on the samecolumn or the same row are electrically connected via one or moredriving bridges (or driving bridge patterns) Bt.

The electrically connected driving electrodes Tx correspond to a singledriving line Tx line in FIG. 8.

For example, a driving electrode Tx at a point T1, a driving electrodeTx at a point t2, a driving electrode Tx at a point t3, and a drivingelectrode Tx at a point t4 are electrically connected by correspondingdriving bridges Bt, thereby forming a single driving line Tx line. Adriving electrode Tx at a point t5, a driving electrode Tx at a pointt6, a driving electrode Tx at a point t7, and a driving electrode Tx ata point t8 are electrically connected by corresponding driving bridgesBt, thereby forming a single driving line Tx line. A driving electrodeTx at a point t9, a driving electrode Tx at a point t10, a drivingelectrode Tx at a point t11, and a driving electrode Tx at a point t12are electrically connected by corresponding driving bridges Bt, therebyforming a single driving line Tx line. A driving electrode Tx at a pointt13, a driving electrode Tx at a point t14, a driving electrode Tx at apoint t15, and a driving electrode Tx at a point t16 are electricallyconnected by corresponding driving bridges Bt, thereby forming a singledriving line Tx line.

At least one driving electrode among the driving electrodes Tx locatedon the same column or the same row is electrically connected to one ormore driving signal lines Lt.

Referring to FIG. 9, the sensing electrodes Rx located on the samecolumn or the same row are electrically connected via one or moresensing bridges (or sensing bridge patterns) Br.

The electrically connected sensing electrodes Rx correspond to a singlereceiving line Rx line in FIG. 8.

For example, a sensing electrode Rx at a point r1, a sensing electrodeRx at a point r2, a sensing electrode Rx at a point r3, a sensingelectrode Rx at a point r4, and a sensing electrode Rx at a point r5 areelectrically connected via corresponding sensing bridges Br, therebyforming a single receiving line Rx line. A sensing electrode Rx at apoint r6, a sensing electrode Rx at a point r7, a sensing electrode Rxat a point r8, a sensing electrode Rx at a point r9, and a sensingelectrode Rx at a point r10 are electrically connected via correspondingsensing bridges Br, thereby forming a single receiving line Rx line. Asensing electrode Rx at a point r11, a sensing electrode Rx at a pointr12, a sensing electrode Rx at a point r13, a sensing electrode Rx at apoint r14, and a sensing electrode Rx at a point r15 are electricallyconnected via corresponding sensing bridges Br, thereby forming a singlereceiving line Rx line.

At least one sensing electrode among the sensing electrodes Rx locatedon the same row or the same column is electrically connected to one ormore sensing signal lines Lr corresponding thereto.

The touch sensing circuit 140 can supply touch driving signals to thedriving signal lines Lt and sense a touch and/or a touched positionbased on touch sensing signals received through the sensing signal linesLr.

As described above, when touch sensing is performed using the mutualcapacitance-based touch structure, accurate touch sensing can beadvantageously performed without ghosting or misplaced location sensing.

In the structure illustrated in FIG. 9, each of the touch sensors TS ofthe touch panel TP may be a bulk type touch electrode without an openarea OA or a mesh type touch electrode having open areas OA.

FIG. 10 illustrates further another exemplary mutual capacitance-basedtouch panel TP according to exemplary embodiments.

Referring to FIG. 10, each of touch sensors TS of the touch panel TP isimplemented as a mesh type touch electrode having open areas OA.

Hereinafter, a TOE structure able to improve touch sensitivity byreducing RC delay in a mutual capacitance-based touch sensing structureincluding mesh type touch sensors TS having open areas will be describedwith reference to FIG. 11 to FIG. 21.

FIG. 11 is a cross-sectional view taken along line A-A′ in the touchpanel TP illustrated in FIG. 10, and FIG. 12 is a cross-sectional viewtaken along line B-B′ in the touch panel TP illustrated in FIG. 10.

Referring to FIG. 11 and FIG. 12, in the display panel 110, theencapsulation layer 400 is located on a second electrode layer 1110 onwhich the second electrode E2 acting as the cathode is located.

Touch sensors TS used for touch sensing may be located directly on theencapsulation layer 400.

Each of the touch sensors TS is comprised of two or more sub-electrodesSE1 and SE2.

The two or more sub-electrodes SE1 and SE2 are electrically connected.

Regarding the mutual capacitance-based touch sensing structure, thetouch sensors TS are categorized as driving electrodes Tx and sensingelectrodes Rx.

Referring to FIG. 11, a single driving electrode Tx is comprised of twoor more sub-electrodes SE1 and SE2.

The two or more sub-electrodes SE1 and SE2 of the single drivingelectrode Tx are located on different layers.

The two or more sub-electrodes SE1 and SE2 of the single drivingelectrode Tx are electrically connected via a contact hole extendingthrough an insulation layer 1120.

Referring to FIG. 12, a single sensing electrode Rx is comprised of twoor more sub-electrodes SE1 and SE2.

The two or more sub-electrodes SE1 and SE2 of the single sensingelectrode Rx are located on different layers.

The two or more sub-electrodes SE1 and SE2 of the single drivingelectrode Tx are electrically connected via a contact hole extendingthrough the insulation layer 1120.

Referring to FIG. 10, in the area in which the line A-A′ crosses theline B-B′, two driving electrodes Tx are electrically connected, and twosensing electrodes Rx are electrically connected.

Referring to FIG. 11, the driving electrode Tx located at a point A andthe driving electrode Tx located at a point A′ are electricallyconnected via a driving bridge Bt formed of the same material as thefirst sub-electrode SE1.

Specifically, the first sub-electrode SE1 of the driving electrode Txlocated at the point A and the first sub-electrode SE1 of the drivingelectrode Tx located at the point A′ are electrically connected via thedriving bridge Bt formed of the material of the first sub-electrode.

Referring to FIG. 12, the sensing electrode Rx located at a point B andthe sensing electrode Rx located at a point B′ are electricallyconnected via a sensing bridge Br formed of the same material as thesecond sub-electrode SE2.

Specifically, the second sub-electrode SE2 of the sensing electrode Rxlocated at the point B and the second sub-electrode SE2 of the sensingelectrode Rx located at the point B′ are electrically connected via thesensing bridge Br formed of the material of the second sub-electrodeSE2.

The driving bridge Bt and the sensing bridge Br are located on differentsub-electrode layers.

For example, the driving bridge Bt may be located on a firstsub-electrode layer on which the first sub-electrode SE1 is disposed,while the sensing bridge Br may be located on a second sub-electrodelayer on which the second sub-electrode SE2 is disposed.

As described above, in the TEO structure in which the touch sensors TSare disposed on the encapsulation layer 400, the touch sensors TS have amulti-electrode structure comprised of the first and secondsub-electrodes SE1 and SE2, such that the resistance of the touchsensors TS can be significantly reduced. This can consequently improvetouch sensitivity by reducing RC delay in the TOE structure having thetouch sensors TS disposed on the encapsulation layer 400 in which RCdelay would otherwise be inevitably increased.

In addition, in the display panel 110, pads (not shown) connecting thesignal lines TL to the touch sensing circuit 140 may be formed of thesame material as one of the two or more sub-electrodes SE1 and SE2.

FIG. 13 and FIG. 14 illustrate open areas of a touch sensor TS andlight-emitting areas in the touch display device 100 according toexemplary embodiments.

Referring to FIG. 13 and FIG. 14, a single touch sensor TS is formed inan area TSA of a plurality of subpixels, except for the light-emittingareas of the subpixels.

Thus, a single touch sensor TS includes a plurality of open areas OA,each of which corresponds to a light-emitting area of a single subpixeldefined by banks 1400.

FIG. 15 illustrates a multi-electrode structure of touch sensors TS anda single line structure of signal lines in the touch display device 100according to exemplary embodiments, and FIG. 16 illustrates amulti-electrode structure of touch sensors TS and a multi-line structureof signal lines in the touch display device 100 according to exemplaryembodiments.

Referring to FIG. 15 and FIG. 16, signal lines TL electricallyconnecting the plurality of touch sensors TS to the touch sensingcircuit 140 are also disposed on the encapsulation layer 400.

Since the signal lines TL are disposed on the encapsulation layer 400 asdescribed above, a complete TOE structure can be provided.

The signal lines TL may have a single-line structure as illustrated inFIG. 15 or may have a multi-line structure as illustrated in FIG. 16.

When the signal lines TL have a multi-line structure, each of the signallines TL is comprised of two or more sub-lines SL1 and SL2, asillustrated in FIG. 16.

Since each of the signal lines TL is comprised of two or more sub-linesSL1 and SL2 as described above, the resistance of the signal line TL canbe reduced. This can consequently reduce RC delay and improve signaltransmission performance.

Hereinafter, a method of forming touch sensors and signal lines in theTOE structure illustrated in FIG. 16 will be described with respect to acase in which each of the driving electrodes Tx and the sensingelectrodes Rx corresponding to the touch sensors TS is comprised of twosub-electrodes SE1 and SE2 and each of the driving signal lines Lt andthe sensing signal lines Lr corresponding to the signal lines TL iscomprised of two sub-lines SL1 and SL2.

(1) The first sub-electrodes SE1 of the driving electrodes Tx and thesensing electrodes Rx corresponding to the touch sensors TS, the drivingbridges Bt connecting the first sub-electrodes SE1 of adjacent drivingelectrodes Tx, and the first sub-lines SL1 of the driving signal linesLt and the sensing signal lines Lr corresponding to the signal lines TLare formed on the encapsulation layer 400.

(2) The insulation layer 1120 is formed on the first sub-electrodes SE1,the driving bridges Bt, and the first sub-lines SL1.

(3) The second sub-electrodes SE2 of the driving electrodes Tx and thesensing electrodes Rx corresponding to the touch sensors TS, the sensingbridges Br connecting the second sub-electrodes SE2 of adjacent drivingelectrodes Tx, and the second sub-lines SL2 of the driving signal linesLt and the sensing signal lines Lr corresponding to the signal lines TLare formed on the insulation layer 1120.

Here, the second sub-electrodes SE2 are electrically connected to thefirst sub-electrodes SE1 via contact holes formed in the insulationlayer 1120.

FIG. 17 and FIG. 18 illustrate an exemplary structure for improving thesensitivity of the touch sensors TS in the touch display device 100according to exemplary embodiments.

Referring to FIG. 17, transparent electrodes 1700 are disposed below thetouch sensors TS.

Specifically, each of the transparent electrodes 1700 is disposedbetween the encapsulation layer 400 and the first sub-electrode SE1 ofthe touch sensor TS corresponding thereto.

Alternatively, the transparent electrodes 1700 may be disposed on thetouch sensors TS. Specifically, each of the transparent electrodes 1700may be disposed on the uppermost sub-electrode (SE2 in FIG. 17) amongthe two or more sub-electrodes of the touch sensor TS correspondingthereto.

Alternatively, each of the transparent electrodes 1700 may be disposedbetween the two or more sub-electrodes of the touch sensor TScorresponding thereto.

Since each touch sensor TS is comprised of two or more sub-electrodesSE1 and SE2 and a transparent electrode 1700 as described above,resistance can be further reduced. For example, when two or moresub-electrodes SE1 and SE2 of each touch sensor TS are opaque, theresistance of each touch sensor TS may be reduced due to the transparentelectrode 1700.

Referring to FIG. 18, the area of the transparent electrode 1700 isgreater than the area of either the first sub-electrode SE1 or thesecond sub-electrode SE2. Here, the width W2 of the transparentelectrode 1700 is greater than the width W1 of either the firstsub-electrode SE1 or the second sub-electrode SE2.

The above-described structure of the transparent electrodes 1700 canincrease the substantial area of the touch sensors TS without reducingthe light-emitting areas. This can consequently increase capacitanceassociated with touch sensing, thereby improving touch sensitivity.

The above-described structure of the transparent electrodes 1700 isapplicable to both the mutual capacitance-based touch structure and theself-capacitance-based touch structure.

FIG. 19 illustrates an exemplary structure for protecting the touchsensors TS in the touch display device 100 according to exemplaryembodiments.

Referring to FIG. 19, a passivation layer 1900 is disposed on the touchsensors TS.

The passivation layer 1900 is able to protect the underlying touchsensors TS.

FIG. 20 illustrates an exemplary interlayer protection structure in thetouch display device 100 according to exemplary embodiments.

Referring to FIG. 20, a buffer layer 2000 is disposed between theencapsulation layer 400 and the touch sensors TS.

The buffer layer 2000 may be formed of an organic material or aninorganic material.

The buffer layer 2000 can prevent the encapsulation layer 400 from beingdamaged by the touch sensors TS formed of metal during or after thefabrication of the panel.

FIG. 21 illustrates an example of modified bridges in the touch displaydevice 100 according to exemplary embodiments.

While two touch sensors are electrically connected via a single bridgeBr as illustrated in FIG. 11, two or more bridges Br may be provided asillustrated in FIG. 21.

This configuration can reduce the resistance of the bridges Br, therebyimproving signal transmission performance.

Hereinafter, a TOE structure able to improve touch sensitivity byreducing RC delay in a mutual capacitance-based touch sensing structureincluding bulk type touch sensors TS without an open area will bedescribed with reference to FIG. 22 to FIG. 24.

FIG. 22 illustrates another exemplary mutual capacitance-based touchpanel TP in which electrode type touch sensors TS without an open areaare disposed, according to exemplary embodiments, FIG. 23 is across-sectional view taken along line A-A′ in the touch panel TPillustrated in FIG. 22, and FIG. 24 is a cross-sectional view takenalong line B-B′ in the touch panel TP illustrated in FIG. 22.

The cross-section illustrated in FIG. 23 is substantially the same asthe cross-section illustrated in FIG. 11, except that the drivingelectrodes Tx do not have open areas OA.

In each of the driving electrodes Tx, the first sub-electrode SE1 andthe second sub-electrode SE2 may be in contact with each other atseveral points or over the entirety of the surface thereof.

The cross-section illustrated in FIG. 24 is substantially the same asthe cross-section illustrated in FIG. 12, except that the sensingelectrodes Rx do not have open areas OA.

In each of the sensing electrodes Rx, the first sub-electrode SE1 andthe second sub-electrode SE2 may be in contact with each other atseveral points or the entirety of the surface thereof.

Hereinafter, a TOE structure able to improve touch sensitivity byreducing RC delay in a self-capacitance-based touch sensing structureincluding mesh type touch sensors TS having open areas will be describedwith reference to FIG. 25 and FIG. 26.

FIG. 25 illustrates an exemplary self-capacitance-based touch panel TPin which electrode type touch sensors TS having open areas are disposed,according to exemplary embodiments.

Referring to FIG. 25, the built-in touch sensors TS of the display panel110 are electrically isolated from each other.

In the display panel 110, signal lines TL are electrically connected tothe touch sensors TS and are electrically isolated from each other.

The touch sensing circuit 140 can supply touch driving signals to thesignal lines TL and can sense a touch or a touched position based ontouch sensing signals received from the signal lines TL.

The application of the self-capacitance-based touch structure asdescribed above can advantageously facilitate the arrangement of thetouch sensors on a single layer, thereby reducing the thickness of thedisplay panel 110 provided with the built-in touch panel. Consequently,self-capacitance-based touch sensing can be driven and performed moresimply while being more resistant to noise, compared to mutualcapacitance-based touch sensing.

FIG. 26 is a cross-sectional view taken along line C-C′ in the touchpanel TP illustrated in FIG. 25.

Referring to FIG. 26, in the display panel 110, the encapsulation layer400 is located on a second electrode layer 1110 on which the secondelectrode E2 acting as the cathode is located.

The touch sensors TS for self-capacitance-based touch sensing arelocated on the encapsulation layer 400.

Each of the touch sensors TS is comprised of two or more sub-electrodesSE1 and SE2.

The two or more sub-electrodes SE1 and SE2 of the single touch sensor TSare electrically connected.

The two or more sub-electrodes SE1 and SE2 of the single touch sensor TSare electrically connected via a contact hole extending through aninsulation layer 1120.

Hereinafter, a TOE structure able to improve touch sensitivity byreducing RC delay in a self-capacitance-based touch sensing structureincluding bulk type touch sensors TS without an open area will bedescribed with reference to FIG. 27 and FIG. 28.

FIG. 27 illustrates an exemplary self-capacitance-based touch panel TPin which electrode type touch sensors TS without an open area aredisposed, according to exemplary embodiments, and FIG. 28 is across-sectional view taken along line C-C′ in the touch panel TPillustrated in FIG. 27.

Referring to FIG. 28, in the display panel 110, the encapsulation layer400 is located on a second electrode layer 1110 on which the secondelectrode E2 acting as the cathode is located.

The touch sensors TS for self-capacitance-based touch sensing arelocated on the encapsulation layer 400.

Each of the touch sensors TS is comprised of two or more sub-electrodesSE1 and SE2.

The two or more sub-electrodes SE1 and SE2 of the single touch sensor TSare electrically connected.

The two or more sub-electrodes SE1 and SE2 of the single touch sensor TSare electrically connected via a contact hole extending through aninsulation layer 1120.

Referring to FIG. 28, the bulk type touch sensors TS without an openarea may be transparent electrodes.

According to exemplary embodiments as set forth above, the use of theTOE structure able to reduce RC delay can improve touch sensitivity.

In addition, the TOE structure able to reduce RC delay can facilitatethe fabrication of large panels.

Furthermore, the TOE structure able to reduce RC delay allows mobiledevices and wearable devices to be thinner and allows touch sensitivityof such devices to be improved.

The foregoing descriptions and the accompanying drawings have beenpresented in order to explain the certain principles of the presentdisclosure. A person skilled in the art to which the disclosure relatescould make many modifications and variations by combining, dividing,substituting for, or changing the elements without departing from theprinciple of the disclosure. The foregoing embodiments disclosed hereinshall be interpreted as illustrative only but not as limitative of theprinciple and scope of the disclosure. It should be understood that thescope of the disclosure shall be defined by the appended claims andtheir equivalents fall within the scope of the disclosure.

What is claimed is:
 1. A touch display device comprising: a displaypanel comprising data lines, gate lines, subpixels, touch sensors, andsignal lines electrically connected to at least a subset of the touchsensors; and a touch sensing circuit sensing a touch or a touchedposition using the touch sensors, wherein the touch sensors comprise aplurality of first touch electrodes located on a layer on anencapsulation layer and a plurality of second touch electrodes locatedon another layer on the encapsulation layer, at least one of theplurality of first touch electrodes electrically connecting two adjacentsecond touch electrodes, wherein at least a part of each of the signallines comprises a first sub-line, and a second sub-line on the firstsub-line electrically connected to the first sub-line.
 2. The touchdisplay device according to claim 1, wherein the signal lines aredisposed on the encapsulation layer.
 3. The touch display deviceaccording to claim 1, wherein each of the signal lines comprises two ormore sub-lines.
 4. The touch display device according to claim 1,wherein the touch sensors are electrically isolated from each other,each of the touch sensors being electrically connected to acorresponding signal line of the signal lines, and wherein the touchsensing circuit supplies touch driving signals to the signal lines andsenses the touch or the touched position based on touch sensing signalsreceived through the signal lines in response to the touch drivingsignals.
 5. The touch display device according to claim 1, wherein eachof the touch sensors comprises a transparent electrode without any openareas within the transparent electrode.
 6. The touch display deviceaccording to claim 1, wherein each of the touch sensors comprises a meshtype electrode having one or more open areas, each of the one or moreopen areas corresponding to a light-emitting area of the subpixels. 7.The touch display device according to claim 1, wherein a passivationlayer is located on the touch sensors.
 8. The touch display deviceaccording to claim 1, wherein a buffer layer is disposed between theencapsulation layer and the touch sensors.
 9. A touch display devicecomprising: a display panel comprising data lines, gate lines,subpixels, and touch sensors; and a touch sensing circuit sensing atouch or a touched position using the touch sensors, wherein the touchsensors comprise a plurality of first touch electrodes located on alayer on an encapsulation layer and a plurality of second touchelectrodes located on another layer on the encapsulation layer, at leastone of the plurality of first touch electrodes electrically connectingtwo adjacent second touch electrodes, and wherein the touch sensorsinclude amorphous transparent conductive materials formed by a lowtemperature deposition process at a process temperature of 100° C. orless.
 10. A touch display device comprising: a display panel comprisingdata lines, gate lines, subpixels, and touch sensors; and a touchsensing circuit sensing a touch or a touched position using the touchsensors, wherein each of the touch sensors comprises a plurality ofdriving electrodes and a plurality of sensing electrodes, wherein theplurality of driving electrodes are located on a layer on anencapsulation layer and the plurality of sensing electrodes are locatedon a different layer on the encapsulation layer, wherein the pluralityof driving electrodes are disposed in a first direction and areelectrically connected to each other via one or more driving bridges,the plurality of driving electrodes electrically connected to acorresponding driving signal line, wherein the plurality of sensingelectrodes are disposed in a second direction and are electricallyconnected to each other via one or more sensing bridges, the pluralityof sensing electrodes electrically connected to a corresponding sensingsignal line, wherein the one or more driving bridges and the one or moresensing bridges are located on different layers of two or moresub-electrodes from one of the plurality of first electrodes and one ofthe plurality of second touch electrodes of one of the touch sensors,and wherein the touch sensing circuit supplies touch driving signals tothe driving signal lines and senses the touch or the touched positionbased on touch sensing signals received through the sensing signal linesin response to the touch driving signals.
 11. A touch display devicecomprising: a display panel comprising data lines, gate lines,subpixels, and touch sensors; and a touch sensing circuit sensing atouch or a touched position using the touch sensors, wherein each of thetouch sensors comprises a plurality of first touch electrodes located ona layer on an encapsulation layer and a plurality of second touchelectrodes located on another layer on the encapsulation layer, at leastone of the plurality of first touch electrodes electrically connectingtwo adjacent second touch electrodes, and wherein a transparentelectrode is disposed on or below one of the touch sensors or isdisposed between two sub-electrodes from one of the plurality of firsttouch electrodes and one of the plurality of second touch electrodes ofthe one of the touch sensors.
 12. The touch display device according toclaim 11, wherein the transparent electrode has an area greater than anarea of each of the two sub-electrodes.
 13. A touch display panelcomprising: subpixels, each subpixel including: an organiclight-emitting diode comprising a first electrode, an organiclight-emitting layer, and a second electrode, and a driving transistorfor driving the organic light-emitting diode; an encapsulation layerlocated on the second electrode of the organic light-emitting diode;touch sensors for touch sensing disposed on the encapsulation layer, thetouch sensors comprising a plurality of first touch electrodes locatedon a layer on the encapsulation layer and a plurality of second touchelectrodes located on another layer on the encapsulation layer, at leastone of the plurality of first touch electrodes electrically connectingtwo adjacent second touch electrodes; and signal lines electricallyconnected to at least a subset of the touch sensors, wherein at least apart of each of the signal lines comprises a first sub-line, and asecond sub-line on the first sub-line electrically connected to thefirst sub-line.
 14. The touch display panel according to claim 13,wherein the encapsulation layer is disposed between one of the pluralityof the first electrodes and an organic light emitting diode or one ofthe plurality of the second electrodes and the organic light emittingdiode.
 15. The touch display panel according to claim 13, wherein apassivation layer is located on the touch sensors.
 16. The touch displaypanel according to claim 13, wherein a buffer layer is disposed betweenthe encapsulation layer and the touch sensors.
 17. The touch displaypanel according to claim 13, wherein a thickness of the encapsulationlayer is in a range of 5 μm to 20 μm.
 18. A touch display panelcomprising: subpixels, each subpixel including: an organiclight-emitting diode comprising a first electrode, an organiclight-emitting layer, and a second electrode, and a driving transistorfor driving the organic light-emitting diode; an encapsulation layerlocated on the second electrode of the organic light-emitting diode; andtouch sensors for touch sensing disposed on the encapsulation layer,each of the touch sensors comprising a plurality of first touchelectrodes located on a layer on the encapsulation layer and a pluralityof second touch electrodes located on another layer on the encapsulationlayer, at least one of the plurality of first touch electrodeselectrically connecting two adjacent second touch electrodes, whereinthe touch sensors include amorphous transparent conductive materialsformed by a low temperature deposition process at a process temperatureof 100° C. or less.